Yuav ua li cas qhia qhov tseeb nanopositioning system

1.Kev tsim cov khoom siv nanopositioning

Kev tshawb fawb ntawm nanopositioning, nrog kev daws teeb meem tshwj xeeb hauv nanometer thiab sub-nanometer ntau yam, thiab cov lus teb ntsuas hauv sub-milliseconds, nyob ntawm lub hauv paus ntawm kev ruaj ntseg, precision thiab repeatability ntawm cov tshuab thiab hluav taws xob siv hauv txhua qhov system.

Thawj qhov tseem ceeb uas yuav tsum tau txiav txim siab thaum xaiv lub kaw lus tshiab yuav tsum yog qhov zoo ntawm nws cov qauv tsim thiab tsim khoom.Precision engineering thiab kev saib xyuas kom meej yuav pom tseeb, raug cuam tshuam los ntawm cov txheej txheem ntawm kev tsim kho, cov khoom siv thiab kev teeb tsa ntawm cov khoom siv xws li theem, sensors, cabling thiab flexures.Cov no yuav tsum tau tsim los tsim kom muaj cov qauv ruaj khov thiab ruaj khov, uas tsis muaj flexing thiab distortion nyob rau hauv lub siab los yog thaum lub sij hawm txav, cuam tshuam los ntawm extraneous qhov chaw, los yog ib puag ncig cuam tshuam xws li thermal expansion thiab contraction.

Lub kaw lus yuav tsum tau tsim kom tau raws li qhov xav tau ntawm txhua daim ntawv thov;Piv txwv li, tej yam kev mob nyob rau hauv uas ib tug system siv rau lub optical soj ntsuam ntawm semiconductor wafers yuav muaj tag nrho cov kev khiav hauj lwm cov txheej txheem rau ib tug npaj rau siv nyob rau hauv lub ultra-high nqus tsev vacuum los yog high hluav taws xob.

2.Cov lus tsa suab profile

Ntxiv nrog rau kev nkag siab txog qhov xav tau ntawm daim ntawv thov, nws tseem ceeb heev uas yuav tau xav txog cov lus tsa suab uas yuav xav tau.Qhov no yuav tsum suav nrog:

 Qhov ntev stroke ntev rau txhua axis ntawm kev txav
 Tus naj npawb thiab kev sib xyaw ntawm axes ntawm kev txav: x, y thiab z, ntxiv rau lub ntsis thiab qaij
 Kev khiav ceev
Dynamic motion: piv txwv li, qhov yuav tsum tau luam theej duab nyob rau hauv ob qho tib si cov lus qhia raws txhua axis, qhov yuav tsum tau rau ib tug tas li los yog stepped suab, los yog qhov zoo ntawm kev ntes cov duab ntawm ya;piv txwv li thaum lub cuab yeej txuas rau hauv kev txav.

3.Frequency teb

Cov lus teb zaus yog qhov tseem ceeb ntawm qhov qhia txog qhov ceev uas lub cuab yeej teb rau cov teeb liab tawm tswv yim ntawm ib zaus.Piezo systems teb sai sai rau cov lus txib, nrog ntau dua resonant zaus ua cov lus teb sai dua, ntau dua kev ruaj ntseg thiab bandwidth.Nws yuav tsum raug lees paub, txawm li cas los xij, tias qhov zaus resonant rau lub nanopositioning ntaus ntawv tuaj yeem cuam tshuam los ntawm kev thauj khoom, nrog rau kev nce hauv load txo cov zaus resonant thiab yog li qhov ceev thiab qhov tseeb ntawm nanopositioner.

4.Tshem tawm thiab sawv sijhawm

Nanopositioning tshuab txav deb heev me me, ntawm kev kub ceev.Qhov no txhais tau hais tias lub sijhawm daws teeb meem tuaj yeem yog lub hauv paus tseem ceeb.Qhov no yog lub sij hawm ntev nws yuav siv sij hawm rau kev txav mus los kom txo qis mus rau qib uas tau txais ua ntej cov duab lossis kev ntsuas tau tom qab ntawd.

Los ntawm kev sib piv, lub sij hawm sawv yog lub sij hawm dhau mus rau ib theem nanopositioning txav ntawm ob lub ntsiab lus txib;qhov no feem ntau yog nrawm dua li lub sijhawm daws teeb meem thiab, qhov tseem ceeb tshaj plaws, tsis suav nrog lub sijhawm xav tau rau theem nanopositioning los daws.

Ob qho xwm txheej cuam tshuam rau qhov raug thiab rov ua dua thiab yuav tsum tau suav nrog hauv txhua qhov kev qhia tshwj xeeb.

5.Digital tswj

Kev daws cov teeb meem ntawm cov lus teb zaus, nrog rau kev daws teeb meem thiab lub sij hawm nce, nyob ntawm qhov kev xaiv kom raug ntawm lub kaw lus tswj.Niaj hnub no, cov no yog cov khoom siv digital siab heev uas koom ua ke nrog precision capacitive sensing mechanisms los tsim tshwj xeeb tswj ntawm sub-micron qhov chaw raug thiab siab tshaj tawm.

Raws li ib qho piv txwv, peb qhov tseeb Queensgate kaw-voj tshaj tawm cov tswj tau siv digital notch filtering ua ke nrog precision mechanical stage design.Qhov no ua kom ntseeg tau tias cov resonant frequencies tseem zoo ib yam txawm tias nyob rau hauv cov kev hloov pauv tseem ceeb ntawm kev thauj khoom, thaum muab lub sijhawm nce nrawm thiab lub sijhawm luv luv - tag nrho cov uas tau ua tiav nrog cov qib zoo ntawm kev rov ua dua thiab kev ntseeg tau.

6. Ceev faj tus qauv!

Thaum kawg, nco ntsoov tias cov tuam txhab sib txawv feem ntau xaiv los nthuav qhia cov kev qhia tshwj xeeb hauv ntau txoj hauv kev, uas tuaj yeem ua rau nws nyuaj rau kev sib piv zoo li nyiam.Tsis tas li ntawd, qee qhov system yuav ua tau zoo rau cov qauv tshwj xeeb - feem ntau yog cov txhawb nqa los ntawm tus neeg xa khoom - tab sis ua haujlwm tsis zoo hauv lwm qhov chaw.Yog tias tom kawg tsis yog qhov tseem ceeb rau koj daim ntawv thov tshwj xeeb, ces qhov no yuav tsum tsis yog qhov teeb meem;Nws yog, txawm li cas los xij, muaj peev xwm sib npaug uas yog tias tsis saib xyuas lawv yuav muaj feem cuam tshuam rau qhov zoo ntawm koj cov khoom siv tom qab lossis kev tshawb fawb.

Peb qhov kev pom zoo yog ib txwm tham nrog ntau tus neeg muag khoom kom tau txais kev pom zoo ua ntej txiav txim siab ntawm nanopositioning system uas ua tau raws li koj xav tau.Raws li cov chaw tsim khoom lag luam, uas tau tsim thiab tsim cov tshuab nanopositioning - nrog rau cov theem, piezo actuators, capacitive sensors thiab electronics peb yeej ib txwm zoo siab los muab cov lus qhia thiab cov ntaub ntawv ntawm ntau yam nanopositioning technologies thiab cov khoom siv uas muaj.